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An Approach for Microsystems Codesign

Renato P. RibasFrank H. Behrens

The increasing interest in Microsystems Technology or MEMS (Micro-Electro-Mechanical Systems) is a result of the progress in the integrated circuit (IC) fabrication domain, in the last decades. Nowadays, a great effort is being done to construct non-electrical parts into a single chip in order to obtain monolithic multi-functional smart sensors. For this, the CAD tools must also to support such a multi-domain design environment, including from system behavior description and simulation to a unified layout construction. An approach to Microsystems Codesign is presented, and some back-end tools (layout level) such as layout generators, cross-section and 3D viewers, and etching simulators are already available.

http://csdl.computer.org/dl/proceedings/sbcci/1999/0387/00/03870046.pdf

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